Analysis of Electromagnetic and Thermal Performance of MEMS Inductor Based on Microcoil Array Strategy

The inherent limitations of current microelectromechanical systems (MEMS) thin-film inductors, characterized by low inductance values and limited current-carrying capacity, restrict their significant applications in thin-film electronics and other fields. In this study, we introduce a high current-carrying inductor design based on a novel microcoil array strategy, and we have fabricated glass-based inductors using microfabrication techniques. The results indicate that the array methodology substantially enhances the maximum current-carrying capacity of inductors. Specifically, the 4×3 single-layer array (SLA) inductor developed in this study can sustain a direct current (DC) of up to 3.59 A, which is an order of magnitude (10 times) higher than that reported in other studies, and exhibits satisfactory magnetic performance. This inductor presents substantial potential for application in the realms of future thin-film electronics, flexible electronics, and consumer electronics.