Contact Engineering of 1L-WSe<sub>2</sub> p-FETs: Straightforward WO<sub>x</sub> Doping and Thickness Dependence
This study presents a straightforward <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\text{WO}_{\mathrm{x}}$</tex> doping strategy for the contact region of <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$1 \mathrm{L}-\text{WSe}_{2}$</tex> FETs, utilizing e-beam evaporated <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\text{WO}_{3}$</tex> bulk. We investigate the dopant thickness dependence, revealing that at an optimal thickness of 20 nm, the maximum on current <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$I_{\text{on }}$</tex>, max increases by <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\sim 100$</tex> times, while maintaining an on-off ratio exceeding seven orders. This strategy paves the way for developing Ohmic contacts in <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$1 \mathrm{L}-\text{WSe}_{2}$</tex> FETs.
Authors
- Yanda Zhu (ORCID: https://orcid.org/0000-0002-6966-8741)
- Sean Li (ORCID: https://orcid.org/0000-0003-4437-8817)
- J. C. C. Hwang (ORCID: https://orcid.org/0000-0002-6345-2675)
- Wenyu Wang (ORCID: https://orcid.org/0000-0002-9813-9435)
- Yun Li (ORCID: https://orcid.org/0000-0003-1753-7317)
- Ziyi Wang (ORCID: https://orcid.org/0009-0000-0729-4740)
- Jing‐Kai Huang (ORCID: https://orcid.org/0000-0002-7187-2653)
- Lin Xi (ORCID: https://orcid.org/0000-0003-0479-6475)
- Jiacan Su (ORCID: https://orcid.org/0000-0001-7080-263X)
Institutions
- City University of Hong Kong (HK)
- UNSW Sydney (AU)
- Division of Materials Science and Engineering (AU)
- University of Hong Kong (HK)
Publication Details
- Published
- 2025-03-09
- DOI
- https://doi.org/10.1109/edtm61175.2025.11040906
- Primary Topic
- 2D Materials and Applications
- Type
- article
- Field-Weighted Citation Impact
- 0.00