Benefits of Using High-Resistivity Substrates for RF ICs
Compared to low-resistivity wafers commonly used in CMOS, high-resistivity substrates offer many advantages for radio-frequency integrated circuits. This comprehensive study reveals various benefits of using high-resistivity substrates for radio-frequency integrated circuits, validated in both passive devices and circuits implemented in a foundry 22 nm fully-depleted silicon-on-insulator technology.
Authors
- Ionut Radu (ORCID: https://orcid.org/0000-0002-6839-1015)
- Albert Wang
- Xunyu Li (ORCID: https://orcid.org/0009-0001-1737-9796)
- César Roda Neve
Institutions
- University of California, Riverside (US)
- Soitec (France) (FR)
Publication Details
- Published
- 2025-03-09
- DOI
- https://doi.org/10.1109/edtm61175.2025.11041609
- Primary Topic
- Radio Frequency Integrated Circuit Design
- Type
- article
- Field-Weighted Citation Impact
- 0.00