Synergistic Optimization of Thermal and Electrical Performances in Hetero-integrated β-Ga<sub>2</sub> O<sub>3</sub> SBDs
This work combines 3D Raman thermography with electrothermal simulations to study the thermal behaviors of hetero-integrated <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\beta$</tex> - <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\text{Ga}_{2} \mathrm{O}_{3}$</tex>-on-SiC (GaOISiC) and <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\beta$</tex> - <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\text{Ga}_{2} \mathrm{O}_{3}$</tex> bulk Schottky barrier diodes (SBDs). It shows the benefits of hetero-integration in significantly enhancing heat dissipation. Moreover, we optimize the electrode layouts in GaOISiC SBDs by balancing electrical and thermal characteristics to improve performance. These techniques are beneficial for accurate temperature measurement and effective heat dissipation, which are crucial for <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\beta$</tex> - <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\text{Ga}_{2} \mathrm{O}_{3}$</tex>-based devices.
Authors
- Yang He (ORCID: https://orcid.org/0009-0003-0145-0353)
- Huarui Sun (ORCID: https://orcid.org/0000-0003-1429-0611)
- Wenhui Xu (ORCID: https://orcid.org/0000-0002-5152-9196)
- Tiangui You (ORCID: https://orcid.org/0000-0001-8978-4582)
- Yinfei Xie (ORCID: https://orcid.org/0000-0002-9208-8868)
- Xin Ou (ORCID: https://orcid.org/0000-0002-0316-9958)
- Zhengyue Li (ORCID: https://orcid.org/0009-0008-0526-6496)
Institutions
- Chinese Academy of Sciences (CN)
- Harbin Institute of Technology (CN)
- Shanghai Institute of Microsystem and Information Technology (CN)
- Ministry of Industry and Information Technology (CN)
Publication Details
- Published
- 2025-03-09
- DOI
- https://doi.org/10.1109/edtm61175.2025.11040213
- Primary Topic
- Ga2O3 and related materials
- Type
- article
- Field-Weighted Citation Impact
- 0.00