Towards Spectrum Spurious-Free and Wideband SAW Devices Based on LN/AT-Quartz Layered Structure
This work reports on a novel lithium niobate thin-film on AT-Quartz layered structure with inherent spurious suppression for shear-horizontal surface acoustic wave (SH-SAW) wideband devices. The dispersion curves are twisted vertically by incorporating AT-Quartz substrate with strong concave shear horizontal slowness. We compared the proposed LN/AT-Quartz platform with typical LN/SiO<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf>/SiC structure through device measurements. One port spurious-free LN/AT-Quartz resonators without transverse and high-order modes are experimentally confirmed, while maintaining a high coupling factor and admittance ratio.
Authors
- Jiajun Gao (ORCID: https://orcid.org/0000-0001-7006-5692)
- Sulei Fu (ORCID: https://orcid.org/0000-0001-6582-8632)
- Shuai Zhang (ORCID: https://orcid.org/0000-0002-9003-2879)
- Xinchen Zhou (ORCID: https://orcid.org/0000-0001-6552-7223)
- Boyuan Xiao (ORCID: https://orcid.org/0000-0002-0602-0681)
- Feng Pan (ORCID: https://orcid.org/0000-0002-3788-7894)
- Cheng Song (ORCID: https://orcid.org/0000-0002-7651-9031)
- Fei Zeng (ORCID: https://orcid.org/0000-0001-8735-8766)
- Rui Wang (ORCID: https://orcid.org/0000-0002-9836-451X)
- Peisen Liu (ORCID: https://orcid.org/0000-0003-3185-1206)
- Weibiao Wang (ORCID: https://orcid.org/0009-0008-2559-8041)
- Qiufeng Xu
Institutions
- Tsinghua University (CN)
Publication Details
- Published
- 2025-03-09
- DOI
- https://doi.org/10.1109/edtm61175.2025.11040264
- Primary Topic
- Acoustic Wave Resonator Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- National Science Foundation