Enlargement in Deposition Area of PLD-Made Thick-Film Magnets

Although we applied Nd-Fe-B thick-film magnets fabricated by pulsed laser deposition (PLD) with deposition rate higher than several tens microns per hour to DC brushless motors and small stepping motors, the deposition area was limited within 5 mm2 due to increase in the distribution of thickness with enlarging deposition area. In this research, a laser scanning using a galvanometer mirror and inclined installation of substrates during the deposition were adopted. It was found that not only the thickness distribution but also composition distribution could be suppressed when enlarging the deposition area up to 10 mm in square.