Design of a high frequency power supply suitable for dielectric barrier discharge

A high-frequency power supply system suitable for Dielectric Barrier Discharge (DBD) loads has been designed, with the DBD load as the research object. A linear RC parallel equivalent circuit model was established under high-frequency discharge working conditions. Through load parameter measurement experiments, the characteristics of DBD load parameters changing with voltage frequency were summarized. Based on the load characteristics, a full-bridge inverter topology with a series compensation inductor and load forms a series resonant circuit, achieving high-voltage high-frequency discharge of DBD loads. A mixed modulation strategy of pulse frequency modulation and zero-crossing phase-locked pulse width modulation was proposed, which can achieve frequency scanning and frequency tracking functions. By automatically scanning for the system's inherent resonant frequency based on different DBD loads, frequency tracking is used to avoid the impact of resonance point drift on system stability during operation. This modulation strategy can achieve zero-current turn-on and turn-off of the benchmark bridge arm switches, reducing losses and improving power supply efficiency. Finally, a high-frequency power supply prototype was designed and tested, verifying the feasibility of the design scheme.