Comprehensive Study of Proton and Heavy Ion-Induced Damages for Cascode GaN-Based HEMTs

Proton and heavy ion irradiation experiments were carried out on Cascode GaN HEMT devices. Results show that device degradation from heavy ion irradiation is more significant than from proton irradiation. Under proton irradiation, obvious device degradation occurred. Low-frequency noise testing revealed a notable increase in internal defect density, reducing channel carrier concentration and mobility, and causing electrical performance degradation. Under heavy ion irradiation, devices suffered from single-event burnout (SEB) and exhibited increased leakage current. Failure analysis of post-irradiation devices showed that those with leakage current increase had conductive channels without morphological changes, while burned out devices showed obvious damage between the gate and drain regions. SRIM simulation indicated that ionization energy loss-induced electron–hole pairs and displacement damage from nuclear energy loss were the main causes of degradation. Sentaurus TCAD simulation of heavy ion irradiated GaN HEMT devices confirmed the mechanisms of leakage current increase and SEB.