Direct writing and parameter optimization of microchannels in glass microfluidic chips using RF CO2 laser

Microfluidic chips, featuring microchannels as key components, are crucial in chemistry, biology, and medical diagnostics. This study uses an RF CO₂ laser for direct writing on glass substrates, offering a cost - effective and fast fabrication method for microfluidic chip development. We investigated the RF CO 2 laser’s energy distribution to set guidelines for processing line widths. Key parameters, laser power, processing speed, PPI, and repetition frequency, were studied for their effects on microchannel surface width and depth. We also examined how processing speed, laser power, and surface water films affect edge chipping on glass. Findings show that when PPI exceeds 2000 and processing speed is above 2000 mm/s, microchannel surfaces are smoother. There is a linear relationship between microchannel surface width/depth and laser power/repetition count. To minimize edge chipping, glass processing should remove internal stress, use high speeds, and apply low laser power. Edge chipping can undermine microchannel quality; thus, controlling processing parameters to reduce it is vital for high-quality microfluidic chip fabrication.