SDLA-based Logarithmic Amplifier Integrated with Magnitude Discriminator and Time Discriminator for Real-Time ESD Event Detection

Integrated circuits (ICs) are susceptible to electrostatic discharge (ESD) events. Real-time detection and alerting of ESD events in semiconductor manufacturing environments is critical to control ESD. A new single-chip ESD event detector integrated with a logarithmic amplifier, magnitude discriminator, and time discriminator has been designed and fabricated in a 0.18-μm CMOS process. The amplitude of an ESD event can be detected and converted to 5-bit digital output codes. In contrast, the time duration of an ESD event can be converted to 3-bit digital output codes. The detected output codes can be transmitted to the ESD control center, enabling real-time ESD field control.