Multiple Hypothesis Testing for SEM Image Processing: A Case Study on Standard Cell Partition

The detection and partitioning of standard cells from Scanning Electron Microscope (SEM) images is a crucial step in hardware assurance of Integrated Circuit (IC). Traditional methods may struggle with the noise and complexity of these signals. This paper introduces a novel approach to SEM image processing by framing the standard cell partition problem as a multiple hypothesis testing (MHT) problem. This method enables simultaneous decision-making across many hypotheses, enhancing detection accuracy while controlling the false discovery rate (FDR). We show how MHT can identify partition lines in noisy brightness signals extracted from SEM images. Using the Benjamini-Hochberg (BH) procedure, we achieve effective FDR control, improving detection robustness and providing a clearer understanding of cell structures. This study demonstrates the suitability of MHT for SEM image processing and its potential for other circuit-related challenges.

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Published
2025-05-25
DOI
https://doi.org/10.1109/iscas56072.2025.11044225
Primary Topic
Electron and X-Ray Spectroscopy Techniques
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article
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article

Multiple Hypothesis Testing for SEM Image Processing: A Case Study on Standard Cell Partition

Bah‐Hwee Gwee, Feng Ji, Deruo Cheng, Yiqiong Shi et al.
Electron and X-Ray Spectroscopy Techniques
article

Multiple Hypothesis Testing for SEM Image Processing: A Case Study on Standard Cell Partition

Bah‐Hwee Gwee, Feng Ji, Deruo Cheng, Yiqiong Shi, Xiaoyu Ma, Tong Lin, Yizhen Li
article en

Abstract

The detection and partitioning of standard cells from Scanning Electron Microscope (SEM) images is a crucial step in hardware assurance of Integrated Circuit (IC). Traditional methods may struggle with the noise and complexity of these signals. This paper introduces a novel approach to SEM image processing by framing the standard cell partition problem as a multiple hypothesis testing (MHT) problem. This method enables simultaneous decision-making across many hypotheses, enhancing detection accuracy while controlling the false discovery rate (FDR). We show how MHT can identify partition lines in noisy brightness signals extracted from SEM images. Using the Benjamini-Hochberg (BH) procedure, we achieve effective FDR control, improving detection robustness and providing a clearer understanding of cell structures. This study demonstrates the suitability of MHT for SEM image processing and its potential for other circuit-related challenges.

Nanyang Technological University (SG)
Openalex Percentile: Top 86%
Electron and X-Ray Spectroscopy Techniques
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Multiple Hypothesis Testing for SEM Image Processing: A Case Study on Standard Cell Partition — Bah‐Hwee Gwee, Feng Ji, et al. · (2025) | TGRS Research Map | TGRS