On-line detection of additive concentrations in acidic copper plating solution for metal interconnection by an electrochemical microfluidic workstation
A developed portable electrochemical microfluidic workstation enables accurate, low-volume online detection of electroplating additives (mean relative error <10%), replacing the manual cyclic voltammetry stripping (CVS) employed in lab analysis.
Authors
- Dongping Zhan (ORCID: https://orcid.org/0000-0003-2903-6683)
- Lianhuan Han (ORCID: https://orcid.org/0000-0002-8005-1283)
- Yi Zhao (ORCID: https://orcid.org/0000-0003-1711-4250)
- Juxing Zeng
- Jian‐Jia Su (ORCID: https://orcid.org/0000-0003-2258-1830)
- Fang‐Zu Yang (ORCID: https://orcid.org/0000-0003-3363-0837)
- Hu Ren (ORCID: https://orcid.org/0000-0001-7274-287X)
- Tao Song (ORCID: https://orcid.org/0000-0002-0246-0372)
- Bo Zhang (ORCID: https://orcid.org/0000-0002-7444-2827)
- Jiaqiang Yang
Institutions
- Xiamen University (CN)
- ECSI Fibrotools (United States) (US)
- Xiamen University of Technology (CN)
Publication Details
- Journal
- Industrial Chemistry and Materials
- Published
- 2025-01-01
- DOI
- https://doi.org/10.1039/d5im00073d
- Citations
- 4
- Primary Topic
- Electrodeposition and Electroless Coatings
- Type
- article
- Field-Weighted Citation Impact
- 2.92
Funders
- National Natural Science Foundation of China
- National Key Research and Development Program of China