Terahertz Pattern Reconfigurable Antenna Based on MEMS Technology

MEMS技术是一种集成微型机械系统和电子系统的技术，可以在微小尺寸、快速响应条件下执行机械功能。为了满足太赫兹通信系统中的多角度波束转向需求，本文设计了一种基于MEMS技术的多状态方向图可重构天线，工作在中心频率为340 GHz，可以实现八种状态的波束扫描。该天线由对数螺旋天线和一组射频微机电系统(RF-MEMS)开关组成，天线结构采用两层石英玻璃衬底，整体尺寸为0.68λ × 0.68λ × 0.2λ，工作带宽达到15%。该天线可以分别在垂直倾角θ = 32˚、50˚两个平面进行90˚步进的方位面波束调控，在两个俯仰面上进行宽角波束扫描。MEMS technology is a technology that integrates micro-mechanical systems and electronic systems to perform mechanical functions at tiny sizes, with fast response conditions. In order to meet the requirement of multi-angle beam steering in terahertz communication system, a multi-state pattern reconfigurable antenna based on MEMS technology is designed in this paper. It works at the center frequency of 340 GHz and can realize eight beam scanning states. The antenna is composed of logarithmic spiral antenna units and a set of RF-MEMS switches. The antenna structure adopts two layers of quartz glass substrate, the overall size is 0.68λ × 0.68λ × 0.2λ, and the working bandwidth reaches 15%. The antenna can config the azimuth plane beam with 90˚ resolution in two planes with vertical inclination θ = 32˚ and 50˚ respectively, and scan the wide-angle beam in two pitch planes.