Silicon Nanomembrane Miniaturized Spectrometer with Wedge‐Shaped Structures via CMOS‐Compatible Fabrication

Abstract Miniaturized reconstructive spectrometers are of critical significance as they enable the acquisition of incident spectra for analysis with a compact footprint by utilizing reconstruction techniques. However, the typical miniaturized reconstructive spectrometers are not readily adaptable to large‐scale production due to their lack of compatibility with complementary metal‐oxide‐semiconductor (CMOS) manufacturing. Here a silicon nanomembrane miniaturized spectrometer with wedge‐shaped structures based on the silicon‐on‐insulator wafer is demonstrated. The fabrication technique is straightforward and CMOS‐compatible, suggesting the potential of wafer‐scale manufacturing. The atomic‐level thickness variation of the structure enables our spectrometer to theoretically achieve a high level of integration. The spectrometer achieves a resolution of ≈1.85 nm and a spectral wavelength accuracy of up to ≈0.1 nm in a broad bandwidth (from 400 to 1 000 nm) with micron‐scale footprint. Furthermore, the spectrometer's spectrum imaging capabilities are also showcased. This research will introduce a feasible paradigm for miniaturized reconstructive spectrometers with a high performance and the potential for commercial application.

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Publication Details

Journal
Laser & Photonics Review
Published
2025-06-24
DOI
https://doi.org/10.1002/lpor.202402211
Primary Topic
Acoustic Wave Resonator Technologies
Type
article
Field-Weighted Citation Impact
0.00

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article

Silicon Nanomembrane Miniaturized Spectrometer with Wedge‐Shaped Structures via CMOS‐Compatible Fabrication

Jiachuo He, Bingxin Chen, Enming Song, Binmin Wu et al.
Laser & Photonics Review
Acoustic Wave Resonator Technologies
article

Silicon Nanomembrane Miniaturized Spectrometer with Wedge‐Shaped Structures via CMOS‐Compatible Fabrication

Jiachuo He, Bingxin Chen, Enming Song, Binmin Wu, Mingze Ma, Zhiyuan Qiao, Jizhai Cui, Qinglei Guo, Chunyu You, Xiangzhong Chen, Yongfeng Mei, Zhi Zheng, Chang Liu, Gaoshan Huang, Zhenghua An, Yang Wang, Yuhang Hu, Xing Li, Ziyu Zhang, Changlin Zheng, Tianjun Cai
article en

Abstract

Abstract Miniaturized reconstructive spectrometers are of critical significance as they enable the acquisition of incident spectra for analysis with a compact footprint by utilizing reconstruction techniques. However, the typical miniaturized reconstructive spectrometers are not readily adaptable to large‐scale production due to their lack of compatibility with complementary metal‐oxide‐semiconductor (CMOS) manufacturing. Here a silicon nanomembrane miniaturized spectrometer with wedge‐shaped structures based on the silicon‐on‐insulator wafer is demonstrated. The fabrication technique is straightforward and CMOS‐compatible, suggesting the potential of wafer‐scale manufacturing. The atomic‐level thickness variation of the structure enables our spectrometer to theoretically achieve a high level of integration. The spectrometer achieves a resolution of ≈1.85 nm and a spectral wavelength accuracy of up to ≈0.1 nm in a broad bandwidth (from 400 to 1 000 nm) with micron‐scale footprint. Furthermore, the spectrometer's spectrum imaging capabilities are also showcased. This research will introduce a feasible paradigm for miniaturized reconstructive spectrometers with a high performance and the potential for commercial application.

Laser & Photonics ReviewVol. 19(22)
Shandong University (CN), Fudan University (CN), Shanghai Institute of Technical Physics (CN), Yiwu Science and Technology Research Institute (CN), State Key Laboratory of Surface Physics
National Natural Science Foundation of China, Science and Technology Commission of Shanghai Municipality
Openalex Percentile: Top 86%
Acoustic Wave Resonator Technologies
DOISourceOpenAlex
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