Development of a compact microbeam system

Abstract We have developed the MB-I and MB-II lines, consisting of quadrupole lenses, object and divergence-defining slits, and integration with IBA techniques for application in multiple fields. The general-purpose type of MB-II, MB-II-AQUA has been used not only at Tohoku University but also in other laboratories. However, the total beamline length is substantial due to the doublet configuration, limiting its introduction in certain laboratory environments. To address this issue, we considered shortening the beamline by implementing a triplet configuration and investigated the impact of shortening the existing MB-II line. Our findings indicate that, even with a reduced object–lens distance, a beam size of approximately 1 μm can be achieved. However, to achieve a beam size smaller than this, the divergence angle must be narrowed. In such cases, doublet configurations proved more advantageous because the effect of spherical aberration was minimized. The performance of the triplet system may vary depending on the laboratory; it is greatly influenced by the brightness distribution of the accelerator. In any case, the triplet system can be easily switched between the doublet and triplet arrangements through wiring and can be adapted for different purposes. As such, the compact MB-II-AQUA-SH microbeam system provides considerable flexibility for various fields and applications.

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Institutions

Publication Details

Journal
The European Physical Journal Plus
Published
2025-06-24
DOI
https://doi.org/10.1140/epjp/s13360-025-06357-2
Citations
2
Primary Topic
Nanofabrication and Lithography Techniques
Type
article
Field-Weighted Citation Impact
1.35

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article

Development of a compact microbeam system

Kota Kojima, Sho Toyama, S. Matsuyama, T. Matsumoto et al.
2 citations
The European Physical Journal Plus
Nanofabrication and Lithography Techniques
1.35
article

Development of a compact microbeam system

Kota Kojima, Sho Toyama, S. Matsuyama, T. Matsumoto, Y. Kikuchi, Wataru Kada, Yoritaka Ohtsuka, Misako Miwa, Kyoka Maruta, Ayumi Nakatsuma, Natoto Aizawa
article en
2 citations

Abstract

Abstract We have developed the MB-I and MB-II lines, consisting of quadrupole lenses, object and divergence-defining slits, and integration with IBA techniques for application in multiple fields. The general-purpose type of MB-II, MB-II-AQUA has been used not only at Tohoku University but also in other laboratories. However, the total beamline length is substantial due to the doublet configuration, limiting its introduction in certain laboratory environments. To address this issue, we considered shortening the beamline by implementing a triplet configuration and investigated the impact of shortening the existing MB-II line. Our findings indicate that, even with a reduced object–lens distance, a beam size of approximately 1 μm can be achieved. However, to achieve a beam size smaller than this, the divergence angle must be narrowed. In such cases, doublet configurations proved more advantageous because the effect of spherical aberration was minimized. The performance of the triplet system may vary depending on the laboratory; it is greatly influenced by the brightness distribution of the accelerator. In any case, the triplet system can be easily switched between the doublet and triplet arrangements through wiring and can be adapted for different purposes. As such, the compact MB-II-AQUA-SH microbeam system provides considerable flexibility for various fields and applications.

The European Physical Journal PlusVol. 140(6)
Tohoku University (JP)
Ministry of Education, Culture, Sports, Science and Technology, Japan Society for the Promotion of Science
Openalex Percentile: Top 19%
Nanofabrication and Lithography Techniques
1.35
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