Fabrication and Optical Characterization of Low-Loss Barium Titanate Waveguides
This paper presents low-loss monolithic Barium Titanium Oxide (BaTiO3), hereafter referred to as BTO, waveguides fabricated on a Silicon-on-insulator (SOI) platform, using a novel measurement approach based on optical back-scattering reflectometry (OBR). Utilizing this method, a low average propagation loss of 0.7 dB/cm was achieved for a straight waveguide which, to our knowledge, is the lowest propagation loss reported to date based on long BTO ridge-waveguides. Atomic force microscopy (AFM) and scanning electron microscopy (SEM) highlight the smooth sidewalls responsible for lowering the waveguide loss. Design simulations and fabrication processes are presented, followed by optical characterization.
Authors
- Garrett J. Schneider (ORCID: https://orcid.org/0000-0002-9521-2115)
- Shouyuan Shi (ORCID: https://orcid.org/0000-0001-6126-071X)
- Dennis W. Prather (ORCID: https://orcid.org/0000-0002-1363-1333)
- M. Ifaz Ahmad Isti (ORCID: https://orcid.org/0000-0002-1814-8789)
- Zhu Xiaofeng (ORCID: https://orcid.org/0009-0006-8684-6032)
- Peng Yao (ORCID: https://orcid.org/0009-0006-6581-6352)
- Mohammad Jobayer Hossain (ORCID: https://orcid.org/0000-0002-9908-5512)
- Marco Moller de Freitas (ORCID: https://orcid.org/0009-0003-5086-2936)
Institutions
- Phase Sensitive Innovations (United States) (US)
- University of Delaware (US)
Publication Details
- Journal
- IEEE Photonics Technology Letters
- Published
- 2025-06-24
- DOI
- https://doi.org/10.1109/lpt.2025.3582846
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- Office of Naval Research
- Air Force Office of Scientific Research