Low-porosity Composite Film of Anodic AlOOH and Thermally Sprayed Y2O3 Film for Sensor Application

Low-porosity anodic aluminum oxyhydroxide (AlOOH) composite films and thermally sprayed yttrium oxide (Y 2 O 3 ) films exhibit excellent mechanical strength, chemical corrosion resistance, and high dielectric properties.These characteristics make them promising candidates for applications in the sensor field.Plasma-induced corrosion significantly limits the service life of aluminum components in semiconductor equipment.In this study, we aim to develop a dense, plasma-resistant Y 2 O 3 coating on AA6061 substrates through a hybrid approach.A hard anodic oxide layer was first formed to enhance interfacial bonding and buffer thermal stress.Ground Y 2 O 3 powder was then applied by thermal spraying to form a 200-m-thick coating.By reducing the deposition rate, the internal porosity was lowered to approximately 2%.Subsequent aerosol deposition further sealed residual pores, achieving a surface porosity below 0.5%.The resulting composite film exhibited enhanced corrosion resistance, thermal stability, and structural integrity under plasma exposure.This integrated process demonstrates potential for scalable, high-performance protective coatings in advanced semiconductor manufacturing environments.