Design of Inverter Power Supply for RF Ion Source

A design for the inverter power supply of the RF ion source is proposed to prepare for discharge experiments based on the RF ion source inverter power supply. Firstly, the device selection and circuit design of the driving circuit and the inverter main circuit of the high-frequency inverter power supply were conducted. The inverter main circuit utilizes GaN-based switching devices to accommodate high switching frequencies. Subsequently, the output performance of the driving module and the inverter power supply was tested. The test results indicate that the output frequency of the driving module can reach 1 MHz. Under the condition of a DC input voltage, the output voltage frequency of the inverter power supply can achieve 500 kHz.