“Canode”: A conical partially magnetic anode for efficient negative ion extraction from duoplasmatron ion sources

We report on the design and performance of an improved duoplasmatron ion source for secondary ion mass spectrometers. The source is designed specifically to optimize extraction of negative oxygen ions while suppressing electron extraction using a built-in magnetic asymmetry in the anode electrode. Other changes from conventional designs are (a) drilling the ion extraction aperture directly into the magnetic steel anode rather than in a refractory (nonmagnetic) metal insert, thereby eliminating a magnetic “hole” that acts to counter the desired magnetic concentration of the discharge at the aperture and (b) forming the anode into a conical shape convex toward the intermediate electrode to increase the magnetic field concentration at the extraction aperture, hence the term “Canode.” The built-in magnetic asymmetry allows the width and shape of the intermediate electrode to be varied to further optimize magnetic concentration of the discharge. Tests were performed with both ims 6f and NanoSIMS 50L instruments manufactured by Cameca Instruments, Inc. (Fitchburg, WI, USA). In the ims 6f, the Canode design gave O− primary ion currents up to a factor of five greater than the factory ion source design. In the NanoSIMS 50L, the Canode source produced a focused O− ion beam at the sample with a diameter of 50 nm, identical to the performance of the radio-frequency Hyperion ion source developed by Oregon Physics (Beaverton, OR, USA) and offered as an option by Cameca.