Investigating a corrective online measurement method for the tool influence function in millimetre spot-sized ion beam figuring
Investigating a corrective online measurement method for the tool influence function in millimetre spot-sized ion beam figuring.
Authors
- Haixiang Hu (ORCID: https://orcid.org/0000-0003-1317-0458)
- Meng Bian (ORCID: https://orcid.org/0000-0002-2889-3192)
- Wa Tang
- Xuejun Zhang (ORCID: https://orcid.org/0000-0001-6881-9504)
- Ji Peng (ORCID: https://orcid.org/0000-0001-8791-3440)
Publication Details
- Journal
- Light Advanced Manufacturing
- Published
- 2025-01-01
- DOI
- https://doi.org/10.37188/lam.2025.050
- Citations
- 1
- Primary Topic
- Integrated Circuits and Semiconductor Failure Analysis
- Type
- article
- Field-Weighted Citation Impact
- 0.73
Funders
- National Natural Science Foundation of China
- Chinese Academy of Sciences
- People's Government of Jilin Province
- Youth Innovation Promotion Association of the Chinese Academy of Sciences
- National Key Research and Development Program of China
- Youth Innovation Promotion Association