Optimized Structure Design for High Quality Factor Based on MEMS Quadruple Mass Gyroscope

In this paper, an optimization design of resonant beam architecture is reported for high quality factor (Q factor), based on the single center-support quadruple mass gyroscope (CSQMG). Based on the same gyroscope framework, single resonant beam is designed and changed to parallel narrow beams with optimized parameters. According to simulation results, thermoelastic Q factor increases from 25783 to 98533. Importantly, the eigenfrequencies of operating modes hold on and have no decrease because of the decrease of beam width. Eventually, the experimental frequency-scanning shows the Q factor of fabricated gyroscope increases from 18351.8 to 74246.8. At the same time, mode frequencies keep almost identical.