Design and Test of High-Performance Navigation Grade MEMS Resonant Accelerometers

This paper presents the design, optimization and test of two high-performance navigation grade MEMS resonant accelerometers (MRAs) with specific dynamic ranges of 20g and 50g, tailored for various application scenarios. The key design details with respect to the MRAs' overall performance, including optimization of temperature-insensitive structure, increase of the translational mode frequency, and mitigation of scale factor nonlinearity error, are discussed. The experiment results show that the two types of MRA prototypes exhibit excellent bias and scale factor stability, in a wide temperature range from −40 to 60°C, superior to 10 μg and 1ppm, respectively. Moreover, a less than 5 μg/g2 vibration rectification error (VRE) demonstrates their good vibration immunity.