Mechanical-Thermal Noise Limited Near-Navigation Grade MEMS IMU

In this work we demonstrate a new MEMS IMU family by integrating our inertial sensors with a softwaredefined ASIC and embedded MCU to deliver near-navigation grade, multi-core, 6-DOF IMU. The core components contain both ASIC and MEMS inside a stand-alone ceramic package of 7×7×2 mm<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">3</sup> size delivering noise levels of 0.004 o/√hr gyroscope's Angle Random Walk at 100 Hz bandwidth and 0.008 (m/s)/√hr accelerometer's Velocity Random Walk at 750 Hz bandwidth. Over temperature range of −40 to +85°C we demonstrated ∼1°/hr offset and 60 ppm scale-factor residuals, which is 30x improvement over previous generation ADI's IMUs, thereby approaching near-navigation grade performance.