On the Feasibility of the BDRIE-HS* Technology for a MEMS Gyroscope
Within this paper we report on the feasibility of a new technology approach towards higher sensitivity in MEMS devices with extremely small motion, such as gyroscopes. The approach utilizes aspect ratio dependent etching (ARDE) together with a cavity SOI like technology to create regions with very small electrode gaps and maintain regions with a large structure height for large masses and stable in-plane motion.
Authors
- Daniel Bülz (ORCID: https://orcid.org/0009-0006-3440-8161)
- Karla Hiller (ORCID: https://orcid.org/0000-0003-2686-6788)
- Dirk Wünsch
- Roman Forke (ORCID: https://orcid.org/0000-0003-4293-2060)
- Matthias Küchler
- Alexey Shaporin (ORCID: https://orcid.org/0009-0005-9214-3571)
- Sebastian Weidlich
- Susann Hahn
Institutions
- Chemnitz University of Technology (DE)
- Fraunhofer Institute for Electronic Nano Systems (DE)
Publication Details
- Published
- 2025-05-04
- DOI
- https://doi.org/10.1109/inertial63280.2025.11037080
- Primary Topic
- Inertial Sensor and Navigation
- Type
- article
- Field-Weighted Citation Impact
- 0.00