A Multi-Bit Electromechanical Sigma-Delta Accelerometer with Complementary Pulse Width Modulated Force Feedback
An electromechanical sigma-delta modulator (EMSDM) is usually used for acceleration sensors to achieve high performance. High order EMSDMs are usually necessary to enhance the quantization noise-shaping ability, due to low DC gain of acceleration sensing elements. However, high order single-bit EMSDMs may suffer from system instability problem. Multi-bit force feedback is an effective way to overcome this problem. This paper reports a multi-bit EMSDM with a complementary pulse width modulated force feedback for a capacitive accelerometer to improve its linearity and noise performance. The measurement results show the noise floor of the 3-bit 3<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">rd</sup>-order EMSDM accelerometer can achieve of about 122 ng/√Hz within 300 Hz bandwidth.
Authors
- Kedu Han
- Xingyin Xiong (ORCID: https://orcid.org/0000-0002-9605-741X)
- Xiaoyuan Yu (ORCID: https://orcid.org/0000-0002-9016-5671)
- Shengru Zhou
- Zongwei Li (ORCID: https://orcid.org/0000-0003-1682-6096)
- Changchun Yang (ORCID: https://orcid.org/0000-0002-7932-1952)
- Zeyu Wang (ORCID: https://orcid.org/0009-0002-2023-5555)
Institutions
- Chinese Academy of Sciences (CN)
- Institute of Geology and Geophysics (CN)
Publication Details
- Published
- 2025-05-04
- DOI
- https://doi.org/10.1109/inertial63280.2025.11037025
- Primary Topic
- Advanced MEMS and NEMS Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00