A Closed-Loop MEMS Resonant Accelerometer with Force Rebalance Control
This paper reports a designed resonant accelerometer with force rebalance control capability, and compares the performance of the sensor in two different operating modes: the conventional frequency shifts as the output signal and the force-rebalance mode with feedback voltage as the output signal. The experimental results demonstrated that the force rebalance control may improve the resolution of the resonant accelerometer for large bandwidth acceleration measurement.
Authors
- Zhenxiang Qi
- Zhaoyang Zhai (ORCID: https://orcid.org/0000-0001-8170-3776)
- Bowen Wang (ORCID: https://orcid.org/0009-0008-3818-2045)
- Bingchen Zhu
- Wuhao Yang (ORCID: https://orcid.org/0000-0001-9511-0461)
- Xudong Zou (ORCID: https://orcid.org/0000-0001-6037-2891)
Institutions
- Chinese Academy of Sciences (CN)
- State Key Laboratory of Transducer Technology (CN)
- Aerospace Information Research Institute (CN)
Publication Details
- Published
- 2025-05-04
- DOI
- https://doi.org/10.1109/inertial63280.2025.11037010
- Primary Topic
- Advanced MEMS and NEMS Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- National Key Research and Development Program of China