Self-Bonding Piezoelectric Micromirrors for Integrated Atomic Beam Devices

We introduce a 45° tilted MEMS mirror for chip-scale atomic devices. The voltage-actuated-and-bonded mirror shows outstanding reflectivity and is a crucial component for laser cooling or interrogation of atomic beam devices, facilitating advancements in wafer-level manufacturing of integrated quantum sensors. By integrating two of these micromirrors with a collimator, excitation source and a detector, an atomic beam clock can be achieved, whose fractional instability could be in the order of ~10<sup xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">−11</sup> at 1s with a chip-scale package.