Effect of Shock Duration on Si-to-Si Stiction

The study reports that the duration of input shocks plays a crucial role in silicon-to-silicon contact stiction events. Experimental results indicate that the stiction rate significantly increases from 0% to 56% as the shock duration is extended from 2 ms to 6 ms. Additionally, the shock duration is found to be more influential than the shock peak. The contact time dependency of stiction may be attributed to the instantaneous formation of a meniscus between the contact surfaces.