Offset Temperature Stability Control for Frequency-Modulated PiezoMEMS Gyroscope

This paper studies the rate offset stability over temperature with a Lissajous frequency-modulated piezoelectric MEMS gyroscope. The offset stability is shown to be highly dependent on the demodulation phase shift, with a stable zero-crossing optimum. After phase adjustments, the offset stability was experimentally confirmed to be 40 mdph/°C. The ARW of the sensor was <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$0.42^{\circ}/\ \sqrt{\mathbf{h}}$</tex>.