Analysis and Measurement of Moisture Ingress Effects on Small Volume and Sub-Ambient Pressure Capacitive MEMS Accelerometers
This work re-derives MIL-STD-883 moisture requirements for MEMS inertial sensor applications. We perform theoretical calculations and experiments to understand moisture-related physical failure modes, and link these to MEMS design.
Authors
- Jason Brown (ORCID: https://orcid.org/0000-0001-6461-9791)
- Thomas A. Friedmann (ORCID: https://orcid.org/0009-0000-1740-8457)
- Tiffany N. Reagan
- Chris Bishop (ORCID: https://orcid.org/0000-0002-0104-8626)
- Ryan Shaffer
- Brian Homeijer
- Raymond Fuentes
Institutions
- Sandia National Laboratories (US)
Publication Details
- Published
- 2025-05-04
- DOI
- https://doi.org/10.1109/inertial63280.2025.11036927
- Primary Topic
- Advanced MEMS and NEMS Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00
Funders
- U.S. Department of Energy
- National Nuclear Security Administration