Study of the Quadrature Error Correction on the GYTRIX Quartz Crystal Axisymmetric MEMS Gyro

We report on the quadrature error correction by femtosecond laser ablation on the quartz crystal MEMS gyro named GYTRIX. First of all, we investigate femtosecond laser ablation as a way to etch gold electrodes of the gyro elements while minimizing quartz damages are given. Then, quadrature error correction on this gyro is studied by finite element simulation (FEM). Eventually, experimental quadrature error nulling is presented, allowing to pass from values as high as 815 °/s down to less than 1 °/s for most gyros which should improve the bias instability and measurement repeatability.