(100) Silicon Ring Gyroscope with Rectangle Spring Aiming at Frequency and Thermoelastic Q-Factor Matching

This paper addresses a MEMS vibratory ring gyroscope with rectangle supporting springs aiming at frequency and Q-factor matching. In our previous report, we proposed a ring resonator with a chamfered rectangle supporting springs that compensates for the anisotropy of the elastic modulus of (100) single-crystal silicon (SCS) and achieved frequency matching. However, we have not considered the anisotropy of Q-factor required for a degenerated resonator. In this research, we investigate TED matching by optimizing the support beam designs by maintaining frequency matching. The design in this study achieved frequency matching of both modes while improving the Q-factor by 17% and reducing the Qmismatch by 35.5%.