Early Measurements of Silicon Axisymmetric MEMS Gyro
This paper presents preliminary results of a new silicon MEMS gyro. This MEMS Coriolis Vibratory Gyroscope (CVG) is based on link elements with counterweight that balance the proof mass momentum assuring its insulation from the environment. We demonstrated high quality factor up to 100 000 for a resonant frequency of 8 kHz. A high linearity (R2 > 0.9999) of the scale factor has been demonstrated over a +/-1000 °/s angular rate range. An Allan variance has been measured and it demonstrated an ARW in open loop of 17 °/√h, which suggest promising performance in closed-loop operation.
Authors
- O. Le Traon (ORCID: https://orcid.org/0000-0002-6006-436X)
- R. Lévy (ORCID: https://orcid.org/0000-0002-4400-9993)
- Alain Bosseboeuf
- Walter W Benjamin (ORCID: https://orcid.org/0000-0003-0282-8605)
- Lucas Hudeley
- Maxime Duquesnoy (ORCID: https://orcid.org/0000-0003-3178-9799)
- Jérémy Bonhomme (ORCID: https://orcid.org/0000-0002-5776-4170)
- Jérôme Juillard (ORCID: https://orcid.org/0000-0002-2055-3599)
- Marc Faucher
Institutions
- Centre National de la Recherche Scientifique (FR)
- Université de Lille (FR)
- Université Paris-Saclay (FR)
- Office National d'Études et de Recherches Aérospatiales (FR)
- Laboratoire de Génie Électrique et Électronique de Paris (FR)
- Sorbonne Université (FR)
- Centre de Nanosciences et de Nanotechnologies (FR)
- CentraleSupélec (FR)
- Institut d'Electronique, de Microélectronique et de Nanotechnologie (FR)
Publication Details
- Published
- 2025-05-04
- DOI
- https://doi.org/10.1109/inertial63280.2025.11037183
- Primary Topic
- Advanced MEMS and NEMS Technologies
- Type
- article
- Field-Weighted Citation Impact
- 0.00