High Precision Capillary Printing for PNT Vibrating MEMS

This paper reports preliminary experimental results concerning the use of high precision capillary printing (HPCAP) for PNT vibrating MEMS sensors applications. By enabling the deposition of thin metallic nanoparticle-based electrodes post-manufacturing, this technique offers a flexible and efficient alternative to conventional deposition methods. Our results demonstrate that ink-based electrodes achieve comparable electrical performance as evaporated gold electrodes on the actuation of the resonators. Furthermore, we have shown that HPCAP can be leveraged for targeted mass deposition to correct quadrature errors in quartz gyroscopes in real time. While challenges remain in terms of ink adhesion and long-term stability, this method holds great promise for rapid prototyping and small-scale production for vibrating MEMS.