Fabrication and Properties of ITTO Segments for Cylindrical Targets by Pressureless Oxygen Atmosphere Sintering Method

Cylindrical targets have a high utilization rate, but are difficult to manufacture. A large hollow ITTO segment with thin walls was prepared by cold isostatic pressure and two-stage sintering. The fabrication process yielded a segment with an outer diameter of 153 mm, an inner diameter of 135 mm, and a length of 700 mm, indicating a length to thickness ratio of up to 78. The dense and uniform green bodies ensure the achievement of high density and uniformity of the sintered body throughout its volume. The segment exhibited a high relative density of about 99.5% and a low resistivity of below 3.4 × 10−4 Ω·cm. The density and resistivity illustrate a minimal inhomogeneity along the length of the segment. The segment exhibits a cubic bixbyite phase and is characterized by densely packed fine grains with an average size of several microns. Therefore, these results establish a substantial foundation for the large-scale production of cylindrical ITTO segments.