High‐Resolution Nanopatterning of Binary Nanoparticles in Nonpolar Solvent via Combined Dielectrophoretic and Coulombic Interactions

Precise nanofabrication of diverse nanoparticles (NPs) with high spatial resolution is crucial for developing advanced nanodevices. While various bottom-up approaches have been developed, limitations such as complex overlay steps, contamination risks, and low spatial resolution still exist. Here, an approach is presented for sub-micron spatial resolution nanopatterning of binary NPs. By utilizing net charges of NPs dispersed in nonpolar solvent, dielectrophoretic attraction and sign-dependent Coulombic modulation are combined to achieve distinct particle densities at oppositely charged surfaces. This selective assembly enables efficient separation of NP mixtures at submicron scales, facilitating the formation of complex binary NP patterns in a single step. The technique offers a powerful and direct route for assembling and integrating multiple NPs, providing a new way for advanced multifunctional nanodevices.