Data-Driven Based Dynamic Decoupling of Micro-Vibration Isolation System

In the semiconductor industry, micro-vibration isolation systems (MVIS) play a critical role in maintaining equipment stability. Despite advancements, current MVIS configurations operate as multi-input multi-output (MIMO) systems, where post-decoupling control still exhibits cross-coupling among different degrees of freedom. This residual coupling challenges the precision and reliability of system performance. This paper proposes a data-driven dynamic decoupling approach to effectively mitigate coupling effects in MVIS. By delving into dynamic decoupling theory and applying it to MVIS, a robust decoupling process is introduced. Experimental results demonstrate that the proposed method significantly reduces internal-degree coupling, thereby enhancing the system's vibration isolation performance and stability. This research contributes novel theoretical and methodological insights to the precision vibration isolation technology for semiconductor equipment, and offering substantial theoretical and practical implications.