Design and Fabrication of a Small-Range Silicon Piezoresistive Differential Pressure Sensor

A piezoresistive pressure sensor with small size, high sensitivity, excellent linearity and low power consumption is designed and fabricated for the needs of pressure sensors in aerospace, automotive electronics and environmental monitoring. The chip size of the sensor is 5 mm×5 mm with a thickness of 386 μm, and the size of the pressure diaphragm is 3020 μm with a thickness of 27.5 μm. The test results show that the sensor can measure a pressure range of 0-10 kPa, with a sensitivity of 1.59 mV/V/kPa and a linearity of 0.63%. The sensor has a broad application prospect in many fields, and its performance will be further optimized and its application in more fields will be promoted in the future.