Design, Modeling and Testing of a Novel Compliant XY Stage for High Frequency and Large Workspace Positioning

This article presents a new type of amplification mechanism. It adopts symmetrical lever mechanism, Scott–Russell mechanism and half-bridge mechanism to increase the natural frequency of the working direction. Based on this hybrid amplification mechanism, a compliant XY positioning stage is designed. Considering the influence of the compliant element, a novel two Port-based modeling method is proposed. The dynamic and static model of the compliant XY positioning stage is then established. Subsequently, the optimal size is obtained by optimization algorithm and verified by finite-element analysis. Finally, the experimental results show that its workspace is 114.5 ×109.6 <italic xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">μ</i>m, and amplification ratios are 5.748 and 5.462 along two axes. The first two modes are 307 Hz and 310 Hz. In addition, the trajectory tracking performance is evaluated through two control methods. The results demonstrate that the stage achieves robust tracking capabilities.