Choice of an Algorithm for Broadband Monitoring of the Optical Coating Deposition Process Taking into Account the Effect of Error Self-Compensation

Two algorithms of broadband optical monitoring of the optical coating deposition process are considered both without solving the additional inverse problem of refining the thicknesses of the already deposited layers and with its solution. It is shown that refining the thicknesses of the already deposited layers leads to a decrease in errors of the thicknesses of the layers but does not always provide a more accurate implementation of the required spectral properties of the coating. For the first time, it is demonstrated that when choosing a monitoring algorithm, the effect of error self-compensation should be taken into account.