Demonstration of lithium niobate integration on a 200-mm silicon photonics wafer using transfer printing
We present a scalable approach for the heterogeneous integration of lithium niobate onto silicon photonics platforms using wafer-scale micro-transfer printing. This approach enables the incorporation of efficient, high-speed modulators while maintaining compatibility with back-end processing. Electro-optic modulators with a length of 7 mm, fabricated with this technology, achieve a half-wave voltage of 4 V and a bandwidth exceeding 70 GHz. Furthermore, as proof of concept, we demonstrate the integration of more than 200 lithium niobate photonic structures directly on a 200-mm wafer and characterize their passive optical properties.
Authors
- Peter Geerinck
- M. Davi
- Tom Vanackere (ORCID: https://orcid.org/0000-0003-4692-9467)
- Günther Roelkens (ORCID: https://orcid.org/0000-0002-4667-5092)
- Francis Ferraro (ORCID: https://orcid.org/0000-0003-2413-9368)
- Nishant Singh (ORCID: https://orcid.org/0000-0003-0609-1145)
- Sadhishkumar Balakrishnan (ORCID: https://orcid.org/0000-0002-6376-3019)
- Sebastian Hänsch
- Emadreza Soltanian (ORCID: https://orcid.org/0000-0002-6091-7350)
- Peter Verheyen (ORCID: https://orcid.org/0000-0002-8245-9442)
- Sarah Uvin (ORCID: https://orcid.org/0000-0001-6008-9906)
- Bart Kuyken (ORCID: https://orcid.org/0000-0002-8745-7833)
- Sofie Janssen
- Dieter Bode
- P. Absil (ORCID: https://orcid.org/0009-0001-5644-1628)
- Arno Moerman (ORCID: https://orcid.org/0000-0003-0945-2786)
- Ewoud Vissers (ORCID: https://orcid.org/0000-0002-5765-0552)
- M. L. Billet (ORCID: https://orcid.org/0000-0002-3823-6639)
- Joris Van Campenhout (ORCID: https://orcid.org/0000-0003-0778-2669)
- Margot Niels
- Jing Zhang (ORCID: https://orcid.org/0000-0002-8971-8611)
- Neha Singh (ORCID: https://orcid.org/0000-0002-4972-0012)
- Xin Guo (ORCID: https://orcid.org/0000-0002-9658-1887)
- H. Mai
Institutions
- Ghent University (BE)
- Analysis and Monitoring of Environmental Risk (IT)
Publication Details
- Journal
- Optics Letters
- Published
- 2025-06-16
- DOI
- https://doi.org/10.1364/ol.564405
- Citations
- 4
- Primary Topic
- Photonic and Optical Devices
- Type
- article
- Field-Weighted Citation Impact
- 2.92