Cryo-CMOS Bias-Voltage Generation and Demultiplexing at mK Temperatures for Large-Scale Arrays of Quantum Devices

The rapidly growing number of qubits in semiconductor quantum computers requires a scalable control interface, including the efficient generation of DC bias voltages for gate electrodes. To avoid unrealistically complex wiring between any room-temperature electronics and the cryogenic qubits, this paper presents an integrated cryogenic solution for the bias-voltage generation and distribution for large-scale semiconductor spin-qubit quantum processors. A dedicated cryo-CMOS demultiplexer and a cryo-CMOS DC DAC have been developed in a 22-nm FinFET process to control a co-developed 2D-array designed with 648 Single Hole Transistors (SHTs). Thanks to the dissipation below 120 <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex-math notation="LaTeX">$\mu$</tex-math></inline-formula>W, the whole system operates at temperatures below 70mK in a custom-built electrical/mechanical infrastructure embedded in a standard singlepulse- tube dilution refrigerator. The bias voltages generated by the cryo-CMOS DAC are demultiplexed to sample-and-hold (S/H) structures, allowing to store 96 unique bias voltages over a 3V range with a voltage drift between 60 <inline-formula xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink"><tex-math notation="LaTeX">$\mu$</tex-math></inline-formula>V/s and 18 mV/s. This work demonstrates a tight integration at mK-temperatures of cryo- CMOS bias generation and distribution with a dedicated large-scale quantum device. This showcases how this approach simplifies the wiring to the electronics, thus facilitating the scaling up of quantum processors towards the large number of qubits required for a practical quantum computer.