Coating of Cubic Boron Nitride Powder with TiN in a Rotating Drum via Gas Phase Processes

To improve the performance of superhard ceramic composites, this study aims to develop a dense, phase-pure, and uniform TiN coating on cubic boron nitride (cBN) particles with a target thickness of at least 150 nm. TiN coatings were applied using atomic layer deposition (ALD) alone, as well as a combined ALD/chemical vapor deposition (CVD) process. While ALD produced uniform and dense coatings, the thickness remained below 50 nm. The combined ALD/CVD approach achieved greater thicknesses up to 500 nm, though coating homogeneity remained a challenge. Optimization efforts, including increased ALD cycles and reduced CVD pressure, led to improved coating uniformity, with 25%–30% of particles coated to thicknesses ≥ 80 nm. Structural analysis confirmed dense, pore-free TiN1−x layers for all synthesized powders. In contrast, the commercial reference powder showed a non-uniform, multiphase coating (α − Ti, Ti2N, and TiN0.53) with defects. While the ALD/CVD powders exhibited better phase purity than the commercial sample, further optimization is needed to achieve consistent coatings above 150 nm. These results suggest the ALD/CVD route is promising for producing coatings suitable for use in ceramic matrix composites.

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Publication Details

Journal
Coatings
Published
2025-06-13
DOI
https://doi.org/10.3390/coatings15060711
Primary Topic
Metal and Thin Film Mechanics
Type
article
Field-Weighted Citation Impact
0.00

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article

Coating of Cubic Boron Nitride Powder with TiN in a Rotating Drum via Gas Phase Processes

M. Höhn, Mathias Herrmann, Sören Höhn, A. Michaelis et al.
Coatings
Metal and Thin Film Mechanics
article

Coating of Cubic Boron Nitride Powder with TiN in a Rotating Drum via Gas Phase Processes

M. Höhn, Mathias Herrmann, Sören Höhn, A. Michaelis, Björn Matthey, Anne‐Kathrin Wolfrum, Mario Krug, Louis Maier
article en

Abstract

To improve the performance of superhard ceramic composites, this study aims to develop a dense, phase-pure, and uniform TiN coating on cubic boron nitride (cBN) particles with a target thickness of at least 150 nm. TiN coatings were applied using atomic layer deposition (ALD) alone, as well as a combined ALD/chemical vapor deposition (CVD) process. While ALD produced uniform and dense coatings, the thickness remained below 50 nm. The combined ALD/CVD approach achieved greater thicknesses up to 500 nm, though coating homogeneity remained a challenge. Optimization efforts, including increased ALD cycles and reduced CVD pressure, led to improved coating uniformity, with 25%–30% of particles coated to thicknesses ≥ 80 nm. Structural analysis confirmed dense, pore-free TiN1−x layers for all synthesized powders. In contrast, the commercial reference powder showed a non-uniform, multiphase coating (α − Ti, Ti2N, and TiN0.53) with defects. While the ALD/CVD powders exhibited better phase purity than the commercial sample, further optimization is needed to achieve consistent coatings above 150 nm. These results suggest the ALD/CVD route is promising for producing coatings suitable for use in ceramic matrix composites.

CoatingsVol. 15(6)
Fraunhofer Institute for Ceramic Technologies and Systems (DE)
Deutsche Forschungsgemeinschaft
Openalex Percentile: Top 85%
Metal and Thin Film Mechanics
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