Design and Research of SiC Laser Lift-Off Equipment Control System

本文通过分析SiC激光剥离工艺的功能需求，确定了设备控制系统设计方案及硬件搭建，软件规划。工控机为主控系统，ACS为运动控制器，直线电机、伺服电机、DD构成XYZθ四维度激光扫描运动平台；并通过控制系统验证，满足了激光剥离工艺要求。This paper analyzes the functional requirements of the SiC laser lift-off process, determines the design scheme of the equipment control system and the hardware choice and software planning. The industrial control computer serves as the main control system, with ACS as the motion controller. The linear motor, servo motor, and DD form the XYZθ four-dimensional laser scanning motion platform. It meets SiC laser lift-off process by verification of the control system.