Mechanical Nonlinear Analysis of MEMS Quadruple Mass Gyroscope Structure

In this paper, the performance characterization, modeling and prediction of silicon MEMS Quadruple Mass Gyroscope (QMG) are described in detail. The QMG is a unique high quality, concentrated mass, modern symmetrical Class II Coriolis vibratory gyroscope (CVG) with interchangeable full Angle, self-calibration and force rebalancing mechanisms. QMG has a very high quality factor (${\mathrm {Q}}=500,000$), resulting in a very narrow-band resonance, and if the nonlinearity is large, the adverse nonlinearity is extremely obvious. The main purpose of this research is to reduce the influence of structural nonlinearity on the normal operation of the gyroscope, so as to achieve the operation at large displacement amplitude. A high linearity multi-folded beam structure design is proposed. Numerical simulation shows that the multi-folded beam can maintain the linear relationship between force and displacement even under large deformation conditions.