Demonstration of Conformal MoS<sub>2</sub> on High-Aspect-Ratio Structures up to 40:1 and Exploration of Manufacturability in a 300mm Fab for 3D NAND applications
This work presents the development of 2D material channels using MoS<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> for vertical device architecture and explores their manufacturability in a 300mm fab. We demonstrate conformal ALD MoS<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> deposition on structure with high aspect ratio up to 40:1 and develop key downstream unit processes, including atomic-level precision etching, gentle deposition of metal contact, and delamination-free metal CMP on 2D materials. Utilizing an approximate 3D NAND structure with vertical macaroni channels, functional contact formation to the MoS<inf xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">2</inf> channel is demonstrated with electrical data.
Authors
- Kam‐Fai Wong (ORCID: https://orcid.org/0000-0002-9427-5659)
- Srinivas Nemani
- Ellie Yieh
- C. W. Wong (ORCID: https://orcid.org/0000-0003-0490-5248)
- Pei Liu (ORCID: https://orcid.org/0000-0002-6854-4333)
- D. Yang (ORCID: https://orcid.org/0009-0002-2675-4022)
- Mahendra Pakala
- Minrui Yu
- Arvind Kumar (ORCID: https://orcid.org/0000-0001-8241-3332)
- Yi‐Hsuan Hsiao (ORCID: https://orcid.org/0000-0002-1593-7969)
- Jeng‐Tzong Chen (ORCID: https://orcid.org/0000-0001-5653-5061)
- Lavinia Nistor
- L. Thomas (ORCID: https://orcid.org/0000-0003-1995-2434)
- Ming‐Hui Chiu (ORCID: https://orcid.org/0000-0003-3753-8149)
- Gaurav Bajaj (ORCID: https://orcid.org/0000-0003-0298-4659)
- Meng Xin (ORCID: https://orcid.org/0000-0002-6754-7065)
- Hongwen Zhou (ORCID: https://orcid.org/0009-0002-2901-277X)
- Hao‐Ling Tang
- M. Frei
- Jason Appell
Institutions
- Applied Materials (United States) (US)
Publication Details
- Published
- 2025-05-18
- DOI
- https://doi.org/10.1109/imw61990.2025.11026929
- Primary Topic
- 2D Materials and Applications
- Type
- article
- Field-Weighted Citation Impact
- 0.00