Application of Areal Topography Parameters in Surface Characterization

This review paper provides a comprehensive overview of selected 3D surface texture parameters defined by ISO 25178-2, with a focus on their metrological aspects in high-resolution measurements using atomic force microscopy (AFM). The parameters Sa, Sz, Sq, Sdq, and Sdr are analyzed in terms of their practical application, sensitivity to measurement conditions, and role in assessing surface functionality. Through a review of the literature and simulations of surface profiles with controlled geometric variations, the study demonstrates how the selected parameters respond to changes in step pitch, step width, slope, and lateral calibration errors. Experimental AFM measurements performed on a certified step height standard further illustrate the impact of calibration on the quality of measurement results. Special emphasis is placed on the importance of evaluating measurement uncertainty. The results confirm the need for rigorous instrument calibration and uncertainty assessment to ensure reliable and comparable surface characterization across different instruments and laboratories.