Study and Characterization of Silicon Nitride Optical Waveguide Coupling with a Quartz Tuning Fork for the Development of Integrated Sensing Platforms

This work demonstrates an ultra-compact optical gas-sensing system, consisting of a pigtailed laser diode emitting at 1392.5 nm for water vapor (H₂O) detection, a silicon nitride (Si₃N₄) optical waveguide to guide the laser light, and a custom-designed, low-frequency, and T-shaped Quartz Tuning Fork (QTF) as the sensitive element. The system employs both Quartz-Enhanced Photoacoustic Spectroscopy (QEPAS) and Light-Induced Thermoelastic Spectroscopy (LITES) techniques for trace gas sensing. A 3.8 mm-wide, S-shaped waveguide path was designed to prevent scattered laser light from directly illuminating the QTF. Both QEPAS and LITES demonstrated comparably low signal-to-noise ratios (SNRs), ranging from 1.6 to 3.2 for a 1.6% indoor H₂O concentration, primarily owing to the reduced optical power (~300 μW) delivered to the QTF excitation point. These results demonstrate the feasibility of integrating photonic devices and piezoelectric components into portable gas-sensing systems for challenging environments.