Parameter Study of 500 nm Thick Slot-Type Photonic Crystal Cavities for Cavity Optomechanical Sensing

In recent years, research on light-matter interactions in silicon-based micro/nano cavity optomechanical systems demonstrates high-resolution sensing capabilities (e.g., sub-fm-level displacement sensitivity). Conventional 2D photonic crystal (PhC) cavity optomechanical sensors face inherent limitations: thin silicon layers (200–300 nm) restrict both the mass block (critical for thermal noise suppression) and optical Q-factor. Enlarging the detection mass in such thin layers exacerbates in-plane height nonuniformity, severely limiting high-precision sensing. This study proposes a 500 nm thick silicon-based 2D slot-type PhC cavity design for advanced sensing applications, fabricated on a silicon-on-insulator (SOI) substrate with optimized air slot structures. Systematic parameter optimization via finite element simulations defines structural parameters for the 1550 nm band, followed by 6 × 6 × 6 combinatorial experiments on lattice constant, air hole radius, and line-defect waveguide width. Experimental results demonstrate a loaded Q-factor of 57,000 at 510 nm lattice constant, 175 nm air hole radius, and 883 nm line-defect waveguide width (measured sidewall angle: 88.4°). The thickened silicon layer delivers dual advantages: enhanced mass block for thermal noise reduction and high Q-factor for optomechanical coupling efficiency, alongside improved ridge waveguide compatibility. This work advances the practical development of CMOS-compatible micro-opto-electromechanical systems (MOEMS).