Design and Fabrication of a Dual-Range MEMS Capacitive Accelerometer With a Novel Dual-Flexural Suspension System

This paper presents the design, sim-ulation, and fabrication of a novel dual-range MEMS capacitive accelerometer that utilizes a dual-flexural suspension system for enhanced dynamic perfor-mance. The device inte-grates two sensing modes—low-g and high-g—within a unified archi-tecture to achieve both high sensitivity and wide dynamic range. Through systematic design optimization using COMSOL Multiphysics, the proposed accelerometer exhibits a high degree of linearity and stability across both operational ranges. Based on UV-Liga technology, the fabrication process is detailed alongside the results of the fabricated sensor's structure. Experimental results demon-strate successful mode switching with a sensitivity of 0.9 mV/g and 0.2 mV/g for low-g and high-g modes, respectively, validating the viability of the dual-mode concept for advanced inertial sensing applications such as navigation and structural monitoring.